BEST AVAILABLE CO^
PN
: JP 07085520 19950331
AN
* JP 05233110 19930920
I CM :
. G11B- 11/10
IN
: ASANO MUTSUMI
IN :
. KATAYAMA KOJI
IN
: SNDO MITSUO
IN
: KONDO AKIO
PA :
: TOSOH CORP
ET
: PRODUCTION OF MAGNETO-OPTICAL RECORDING MEDIUM
PURPOSE: To obtain a magneto-optical recording' medium with a small tilt as well as no
attain a high rate of film formation, to unnecessitate a gas diffusion preventing
mechanism between chamhers in the case of producrion in a multi- chamber sputtering;
device and to enhance the throughput of production*
CONSTITUTION: At least a magnet o-optical recording layer and a dielectric layer are
formed on a substrate. In the resulting magneto-optical recording medium, the dielectric
layer is formed from an jSiC^Jtajrge^ the
const i t uen ;t^JLa vje x^oj^^t he^ recording med i urn^ are f o rrae d by _DC spntte ring wi t h on l y^ gaseous'"'
COPYRIGHT : (C)1995,JPO
Disk Number : MIJP9503PACT
Imprime de Mimosa 10/10/1998 10:51:46 page -1-
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